From Pixels to Nanometers: Integrating Machine Learning and Mechatronics for Photolithography Automation with a Focus on 2D Materials

Abstract

We have tried to optimize the growth parameters of the CVD growth of Bi2O2Se on various substrates, focusing on f-mica. Also, exploring the various techniques of Photolithography to signify the vital role it plays in 2D material research. Moreover, we have proposed and designed an Automated Maskless Photolithography setup by modifying the existing Photolithography setup with merely Stepper Motors, Raspberry Pi, Arduino, A camera and a DLP.